JPH0431323B2 - - Google Patents

Info

Publication number
JPH0431323B2
JPH0431323B2 JP60502664A JP50266485A JPH0431323B2 JP H0431323 B2 JPH0431323 B2 JP H0431323B2 JP 60502664 A JP60502664 A JP 60502664A JP 50266485 A JP50266485 A JP 50266485A JP H0431323 B2 JPH0431323 B2 JP H0431323B2
Authority
JP
Japan
Prior art keywords
prism
light
devices
parallel
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60502664A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61502218A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS61502218A publication Critical patent/JPS61502218A/ja
Publication of JPH0431323B2 publication Critical patent/JPH0431323B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Jib Cranes (AREA)
  • Optical Transform (AREA)
JP60502664A 1984-05-22 1985-05-22 離間配置した装置の相対位置変化の確認装置 Granted JPS61502218A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3419059.7 1984-05-22
DE19843419059 DE3419059A1 (de) 1984-05-22 1984-05-22 Vorrichtung zum feststellen von aenderungen der gegenseitigen position gesondert montierter maschinen

Publications (2)

Publication Number Publication Date
JPS61502218A JPS61502218A (ja) 1986-10-02
JPH0431323B2 true JPH0431323B2 (en]) 1992-05-26

Family

ID=6236565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60502664A Granted JPS61502218A (ja) 1984-05-22 1985-05-22 離間配置した装置の相対位置変化の確認装置

Country Status (5)

Country Link
US (1) US4725738A (en])
EP (1) EP0183811B1 (en])
JP (1) JPS61502218A (en])
DE (2) DE3419059A1 (en])
WO (1) WO1985005443A1 (en])

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3625641A1 (de) * 1986-07-29 1988-02-11 Busch Dieter & Co Prueftech Elektrooptische vorrichtung fuer die dauerueberwachung der gegenseitigen raeumlichen lage zweier maschinen oder maschinenteile
US5491553A (en) * 1994-06-01 1996-02-13 Phillips Kiln Service Company Of Canada, Ltd. Triple laser rotary kiln alignment system
US6169290B1 (en) 1997-08-22 2001-01-02 Valmet-Karlstad Ab Method and measuring device for measuring at an envelope surface
SE510988C2 (sv) * 1997-08-22 1999-07-19 Valmet Karlstad Ab Sätt och mätanordning att beröringsfritt mäta rakhet vid en mantelyta
US7129694B2 (en) * 2002-05-23 2006-10-31 Applied Materials, Inc. Large substrate test system
CN101298982B (zh) * 2008-07-02 2010-06-02 瑞安市瑞光光电仪器有限公司 回转轴同轴度的校准方法及其校准仪

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2703505A (en) * 1948-07-03 1955-03-08 Kearney & Trecker Corp Apparatus for aligning machine elements
US3323408A (en) * 1962-09-04 1967-06-06 Bishop Robert Edward Optical alignment system
US3443872A (en) * 1964-08-31 1969-05-13 Honeywell Inc Remote object orientation measuring device
SE361869B (en]) * 1972-04-14 1973-11-19 Asea Ab
US3923402A (en) * 1973-01-10 1975-12-02 Beloit Corp Method and apparatus for aligning paper machinery
DE2659536C2 (de) * 1976-12-30 1978-07-20 Helmut Ing.(Grad.) Thierbach Meßeinrichtung zur Ermittlung von Lage- oder Maßveranderungen bei Bauoder Maschinenteilen
US4097157A (en) * 1977-03-02 1978-06-27 Fmc Corporation Vehicle wheel aligner for measuring front wheel toe with respect to the rear wheel axis of rotation
US4518855A (en) * 1982-09-30 1985-05-21 Spring-Mornne, Inc. Method and apparatus for statically aligning shafts and monitoring shaft alignment

Also Published As

Publication number Publication date
DE3419059A1 (de) 1985-11-28
EP0183811A1 (de) 1986-06-11
JPS61502218A (ja) 1986-10-02
DE3567098D1 (en) 1989-02-02
US4725738A (en) 1988-02-16
EP0183811B1 (de) 1988-12-28
WO1985005443A1 (en) 1985-12-05

Similar Documents

Publication Publication Date Title
US6870605B2 (en) Method of measuring length and coordinates using laser tracking interferometric length measuring instruments
US4714339A (en) Three and five axis laser tracking systems
EP0386115B1 (en) Calibration system for coordinate measuring machine
CA1220330A (en) Method and apparatus for statically aligning shafts and monitoring shaft alignment
JP4531965B2 (ja) 振れ検出装置、振れ検出装置付き回転レーザ装置及び振れ検出補正装置付き位置測定設定システム
JPH039402B2 (en])
US5430539A (en) Method and arrangement for checking alignment of body axes for parallelism
KR830001843B1 (ko) 전기 광학식 중심선 측정장치
EP2920547B1 (en) System and method for measuring the relative positions of rotary components
US6046799A (en) Device for ascertaining misalignments of two shafts arranged one behind the other
EP2299234B1 (en) Tracking type laser gauge interferometer
JPS63500892A (ja) 軸の位置変化を決定しかつ監視する装置
KR100991353B1 (ko) 코너큐브프리즘과 파장판을 이용한 레이저 동심도 및 직각도 동시측정장치
JPS63292005A (ja) 走り誤差補正をなした移動量検出装置
US4600301A (en) Spinning disk calibration method and apparatus for laser Doppler velocimeter
JPH0431323B2 (en])
US4621924A (en) Optical alignment apparatus
JP2945467B2 (ja) 機械高測定装置
Potapov et al. Analyzing the accuracy of a device for controlling the position of a rotating plane
JPH04268433A (ja) 非球面レンズ偏心測定装置
JP3239682B2 (ja) セグメント位置計測方法
US7511804B1 (en) Crossed beam roof target for motion tracking
US20020189361A1 (en) Inverse corner cube for non-intrusive three axis vibration measurement
JP3421922B2 (ja) アライメント変動測定装置
US4451148A (en) Optical angular interval marker